In the past ten years, the world has begun to vigorously develop Micro-Nano photonics and its technology, combining optoelectronic technology with nanotechnology, and upgrading the existing optoelectronic technology. From basic theories, functional devices with Micro-Nano structures to integrated Micro-Nano photonics system applications and high-resolution real-time image acquisition technology, a large number of innovative principles, methods and technologies have emerged in the field of Micro-Nano photonics and optoelectronic device integration. It is expected to realize a variety of new functional devices on the Micro-Nano scale, opening up a new platform for a new generation of instrument technology.
Basic theory: When the characteristic size of the Micro-Nano structure reaches the nanometer or even the atomic scale, the material parameters in the macro Maxwell equations will change, resulting in various special optical effects, such as the localization of light field breaking the diffraction limit, electromagnetic field enhancement, radiation Enhancement, absorption/transmission/reflection enhancement, nonlinear effect enhancement, slow light effect, equivalent medium effect of deep sub-wavelength structure, etc. These special optical effects are difficult to explain using traditional optical theories, and different physical processes in different structures need to be specifically considered. Clarifying the physical mechanism of these special optical effects will provide theoretical guidance for the design of Micro-Nano photonic devices. At the same time, in the Micro-Nano photonic structure, due to the strong local effect of the light field, the coupling between the light field and other physical fields is enhanced. The complex coupling between light, machine, electricity, heat and other multi-physics fields also needs to be solved by the development of corresponding theories and algorithms. At present, the international community has been able to deal with some multi-physics coupling problems, but it is far from reaching the level of completely solving the problem.
Functional devices: Micro-Nano photonics functional devices can realize light generation, transmission, regulation; detection and sensing at the Micro-Nano scale, and have the advantages of small size, fast speed and overcoming the traditional diffraction limit. At present, new Micro-Nano optoelectronic functional devices based on nanophotonic waveguides, photonic crystals, surface plasmons, and artificial electromagnetic metamaterials can control the light field at the Micro-Nano scale to produce strange electromagnetic response and dispersion characteristics, and have been used for preliminary Realize Micro-Nano-scale integrated light sources, all-optical switches, optical switches, optical modulators, etc. On the basis of optoelectronic devices based on gallium arsenide, indium phosphide, gallium nitride and other inorganic semiconductor materials, the further development of new composite Nano optoelectronic materials and Micro-Nano processing technology and integration technology of a variety of heterogeneous optoelectronic materials is the current international research Hot spot. In addition, functional devices using organic semiconductor materials, such as OLEDs, organic thin film solar cells (OSC), organic thin film transistors (OTFT), etc., have also received extensive attention from the academic and industrial circles.
System application: The design of Micro-Nano structure can effectively improve the conversion efficiency of photoelectric energy, and it is applied to the improvement of photovoltaic conversion efficiency of solar cells; the artificial composite medium composed of sub-wavelength structure can produce electromagnetic stealth, optical deception, etc. Novel physical phenomena have important applications in the detection and anti-detection of optical signals; optical microscopy imaging technology with nanometer resolution has important applications in the fields of biomedical imaging, information storage, precision lithography, material analysis, etc.; Source nanostructures can realize high-sensitivity biosensors, which are currently widely used in biomedical detection and early disease diagnosis; Micro-Nano photonic chip systems can achieve integrated ultra-high-precision frequency (time) standards to meet small satellites, missiles and Requirements for portable devices; based on Nano-structured optical waveguides and Micro-Nano photonic metamaterials, a variety of 3D display effects can be achieved, providing new ideas for the development of naked-eye 3D display systems; air-conditioning control based on Micro-Nano structures can be developed New multiplexing dimensions, including photon orbital angular momentum (OAM) one-dimensional mode space and beam cross-section two-dimensional transverse mode spatial multiplexing (MDM), have the potential to greatly increase the optical information transmission capacity again; based on femtosecond laser implementation The Micro-Nano processing system can produce complex three-dimensional Micro-Nano optical structures, which provides the possibility for complex optoelectronic chip integration.
